This Laser CVD Repair system repairs opaque, clear and Half Tone defects of photomasks for FPD Large size photomask with high repair accuracy.

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Specialty

・Repairs various opaque, clear and Half Tone defects of photomasks for FPD Large size photomask with high repair accuracy.
・Realized High-speed large-area defect repair by aperture beam and high-precision repair of minute defects by spot beam. It is uniquely developed optical systems.
・Flexible pattern copy function with a scanning aperture beam
・Through-pellicle ZAP
・Highly stable defect repair using a long-life Femto second laser, an LD-pumped solid-state laser, and a high-precision stage.
・Large area defect repair by step & repeat function.
・Compatible with various defect inspection system communication interfaces and data formats

Mask Size

Maximum photomask size: G10 (can be customized)

Specification

Please contact HTL sales division

Manufacture

V Technology Co., Ltd.