V Technology delivers a new Mask Writer for LCD TFT, OLED etc.
with Multi-Head parallel exposure strategy enabling high-throughput and accuracy

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Specialty

・1400 x 1600mm Max. Mask size
・High-throughput with Multi-Head, Smart Writing Strategy
・~2x writing speed compared to conventional tool
・High-accuracy with no Mura issue

Writing Speed

13 mm/s (2412 mm2/min., Target)

Minimum L/S

750 nm

Address grid

1 nm (Design grid for CAD)

CD Uniformity

60 nm

CD Linearity

50 nm

Registration

90 nm (Target）

Maker

V-TECHNOLOGY