Venus（Critical dimension measuring tool）
for photomasks for Flat Panel Displays (FPDs)
Accurate measurement of CD (pattern dimensions) of photomasks for FPD

Specialty
・High precision XY stage with long term stability and anti-vibration, and accurate feedback system with linear scales ensure good repeatability.
・A high-resolution monochrome CCD camera (2 megapixels, 1/1.8 inch) and a high performance micro scope provide clear images.
・Automatic measurement ensures stable and consistent results, unaffected by mask deflection or warping and free from operator error.
Compatible photomask size
≤ G10 (customizable)
Maker
V-TECHNOLOGY
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