Gemini(AOI tool)
for photomasks for Flat Panel Displays (FPDs)
for photomasks for Flat Panel Displays (FPDs)
The latest model for high-precision large-size photomasks and halftone masks for AM-OLED
- Specialty
-
・Die to Database, Die to Die inspection with high speed and high resolution
・Specific algorithm for contact hole pattern, that do not require repeating patterns
・Enhanced simple difference comparison algorithm
・In-process review (Concurrent review) function with transmission/reflection image capture of detected defects
・Simultaneous transmission and reflection inspection
- Maker
- V-TECHNOLOGY