Draco(FIB Defect repair tool)
for photomasks for Flat Panel Displays (FPDs)
for photomasks for Flat Panel Displays (FPDs)
The latest model for high-precision large-size photomasks and halftone masks for AM-OLED
- Specialty
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・The differential vacuum system reduces the footprint of the equipment
・Differential vacuum system reduces loading time
・High-precision film thickness control by FIB
・Perfect pattern copy function for fine and complex patterns such as OPC
- Compatible photomask size
- ≤ G10 (customizable)
- Maker
- V-TECHNOLOGY