Draco(FIB Defect repair tool)
for photomasks for Flat Panel Displays (FPDs)
The latest model for high-precision large-size photomasks and halftone masks for AM-OLED


Specialty
・The differential vacuum system reduces the footprint of the equipment
・Differential vacuum system reduces loading time
・High-precision film thickness control by FIB
・Perfect pattern copy function for fine and complex patterns such as OPC
Compatible photomask size
≤ G10 (customizable)
Maker
V-TECHNOLOGY