Automatic measurement of line width, aperture, total pitch, coordinate position and other dimensions of photomasks for FPD

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Specialty

・Air sliders and measuring tables with high positioning accuracy and high flatness
・Laser interferometer and linear encoder to control table position in nanometers
・Thermal chamber to minimize environmental changes, etc.
・These state-of-the-art optomechatronics enable us to achieve the world's highest level of measurement accuracy.
・In addition, accuracy calibration with original measurement software and reference mask, error factors are completely corrected, an ideal grid coordinate system is constructed, and excellent measurement accuracy and reproducibility are guaranteed.

Photomask size

≤ G10 (customizable)

Maker

V-TECHNOLOGY