This Compact Repair system repairs opaque and clear defects of photomasks for semiconductors and electronic components with high repair accuracy.

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Features

・V Technology/HTL jointly developed the photomask repair system for semiconductor middle/low and electronic parts.
・Stable and accurate repair of opaque and clear defects using a long-life LD-pumped solid-state laser.
・Realized High-speed large-area defect repair by aperture beam and high-precision repair of minute defects by spot beam. It is uniquely developed optical systems.
・Through-pellicle ZAP
・Image monitor with high-precision image processing color indication
・Compatible with various defect inspection system communication interfaces and data formats

Minimum Feature Mask Patter

1.0 μm Line & Space

Mask Size

5 inches to 9 inches

Specification

Please contact HTL sales division

Maker

V-TECHNOLOGY / HTL Co. Japan Ltd.