Atomic Layer Deposition (ALD/PEALD) system GEMStar XT
Despite its compact table-top size, it is capable of depositing atomic-level layers.
Deposition is possible on structures up to 200 mm in diameter and 25 mm in height, as well as on carbon nanotubes (CNTs) and graphene. In addition to oxide films, nitride, Pt and Ru metal films can also be deposited.
Various options such as plasma (ICP) unit are available.

  • GEMStar XT-S/DP™ Benchtop PEALD/Thermal ALD system
GEMStar XT-S/DP™ Benchtop PEALD/Thermal ALD
Compact desktop ALD system with plasma unit (PEALD). The use of plasma enhances the ALD process and enables ALD coating at lower temperatures.Films can also be coated on substrates with low heat resistance temperatures.
GEMStar XT-S/D™ Benchtop Thermal ALD
Compact desktop thermal ALD system. Film coatings of High-uniformity and high step coverage are possible with a wide range of materials.
GEMStar XT-R™ Benchtop Thermal ALD (with plasma unit port)
Compact desktop thermal ALD system with plasma unit port for upgrade.
Feature
・Compact desktop type ALD system. It is ideal for laboratory experiments or as a second ALD system.
・The easy-to-use, user-friendly software makes it easy to create deposition recipes.
・Various options such as load locks and glove boxes are available.
What is ALD
ALD (Atomic layer deposition method) enables deposition of uniform, pinhole-free films with atomic-level control.
Nanolaminate coating is also possible on complex shapes such as high aspect ratio structures and carbon nanotubes.
ALD film materials
Al2O3, SiO2, HfO2, TiO2, SnO2, ZnO, AlN, NbN, Pt, Ru etc.（Please contact us for others）
Substrates
Up to 8 inches wafers and height about 25mm structure.
Carbon nanotubes (CNT) or graphene is possible.
Number of ALD ports
A maximum of 8 types of precursors can be installed.
Suitable for coating multilayer films.
Process temperature
Max. 300°C (option 450°C)
Options
Ozone generator, plasma unit system, powder coating fixture (for coating quantum dots and nano-particles), and load lock are also available.
Please contact us for details.
Coating service
We also provide ALD coating services (for a fee) for various oxide films, nitride films, Pt, and Ru metal films.
Please contact us for details.
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Product manufacturer
Arradiance, LCC
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